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    products  Super Clean Valve
DE series Diaphragm Valves


Material: Body: SS316L
Seat: PCTFE/Vespel
Diaphragm: SS316L/Ni-co Alloy/Hastelloy

Typical Application
· Point of use
· Hook up & Special gases system
· Bulk gas Distribution system
· Research labs
Features
· No internal Springs
· Small internal volume/Fully swept flow path
· Easy Purge ability
· Low particle emission
Specification
· Pressure Rating: Vacuum to 10 bar (240 bar optional)
· Operating temperature: -10~80oC
· Helium Leak Test (In board): 1x10-10 scc/sec
· Inner surface: EP (10 Ra / 5 Ra); BA (20 Ra)
· Pneumatic Actuators Optional

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